Authors - Kiruthika R, Gunavathi N Abstract - This study focuses on a conventional inset-fed rectangular patch antenna to investigate various substrate materials for terahertz (THz) frequency applications. The performance of different substrates is evaluated based on their electrical parameters. The operating frequency range by IEEE standards falls within the THz band, specifically from 0.1 to 3, with a center frequency of 1.5 THz. Key performance metrics such as return loss (in dB), bandwidth, gain, directivity, and efficiency are assessed, along with bending tolerance to evaluate mechanical stability. Teflon demonstrates superior radiation characteristics, achieving high gain and directivity values obtained through high-frequency structural simulator (HFSS) and computer simulation technology (CST). Additionally, based on statistical analysis, Arlon Diclad 880 provides better mechanical stability than other substrate materials. The equivalent circuit model is analyzed using advanced design system (ADS) software.